佳能二手i-line光刻机CANON FPA 3000 I4 参数：
|
Magnification
|
5X |
|
Resolution
|
0.35um
|
|
Wafer Size
|
8" SEMI (OF)
|
|
Wafer Loader
|
TYPE6-L
|
|
Reticle Size
|
6" |
|
Reticle Changer
|
Canon standard Type
|
|
Chamber Type
|
CD-80
|
佳能二手i-line光刻机CANON FPA 3000 I4 实物图：
